EPOXY DIELECTRIC FILMS PRODUCED BY ELECTRON BOMBARDMENT

被引:12
作者
BRENNEMA.AE
GREGOR, LV
机构
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D O I
10.1149/1.2423397
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1194 / &
相关论文
共 5 条
[1]  
Buck D. A., 1958, P EASTERN JOINT COMP, P55
[2]   FORMATION OF THIN POLYMER FILMS BY ELECTRON BOMBARDMENT [J].
CHRISTY, RW .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (09) :1680-1683
[3]  
FOTLAND RA, 1962, MAY LOS ANG M SOC
[4]   POLYMERIZATION OF BUTADIENE GAS ON SURFACES UNDER LOW ENERGY ELECTRON BOMBARDMENT [J].
HALLER, I ;
WHITE, P .
JOURNAL OF PHYSICAL CHEMISTRY, 1963, 67 (09) :1784-&
[5]  
PRIEST P, 1963, J APPL PHYS, V34, P347