CHARGE TRANSPORT IN MAGNETRONS

被引：74

作者：

ROSSNAGEL, SM ^{[1
]}

KAUFMAN, HR ^{[1
]}

机构：

[1] FRONT RANGE RES,FT COLLINS,CO 80524

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574434

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2276 / 2279

页数：4

共 11 条

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[2]

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[4]

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[5]

KAUFMAN HR, 1979, NASA CR159813 REP

[6] INDUCED DRIFT CURRENTS IN CIRCULAR PLANAR MAGNETRONS [J].

ROSSNAGEL, SM ;

KAUFMAN, HR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :88-91

[7]

ROSSNAGEL SM, 1986, J VAC SCI TECHNOL A, V3, P1822

[8]

ROSSNAGEL SM, UNPUB J VAC SCI TE A

[9]

SPITZER L, 1974, PHYSICS FULLY IONIZE, P169

[10]

THORNTON JA, 1978, THIN FILM PROCESSES, P76