ION-BEAM SPUTTER DEPOSITION OF MOLYBDENUM CONTACTS FOR SCHOTTKY-BARRIER DIODES

被引：2

作者：

BOJARCZUK, NA ^{[1
]}

PAZ, O ^{[1
]}

AURET, FD ^{[1
]}

机构：

[1] UNIV PORT ELIZABETH,PORT ELIZABETH 6000,SOUTH AFRICA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.571970

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：615 / 617

页数：3

共 12 条

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