RELATIVE SENSITIVITY FACTORS AND USEFUL YIELDS FOR A MICROFOCUSED GALLIUM ION-BEAM AND TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETER

Relative sensitivity factors for several elements in micrometer size glass particles, bulk glasses and glass thin films have been determined for a Ga+ liquid metal ion gun combined with a time-of-flight secondary ion mass spectrometer. The reproducibility of the values within and among glasses of various compositions is better than 20%. Reproducibility is improved by sputter cleaning the sample prior to data collection. Relative sensitivity factors have been obtained from bulk glasses using pulsed, low-energy electrons to neutralize charge buildup on the sample. Useful yields for Mg and Ca in a thin glass film were calculated to be 3.4 x 10(-4) and 8.0 x 10(-4), respectively.