ULTRAHIGH-VACUUM DEPOSITION OF TINO2N-1-NI MULTILAYERS - APPLICATION OF A PULSED MOLECULAR-BEAM SOURCE TO SYNTHESIZE DESIGNED CERAMIC FILMS

被引:7
作者
NOZOYE, H
KAWAGUCHI, K
SHIN, S
机构
关键词
D O I
10.1016/0169-4332(88)90363-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:640 / 645
页数:6
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[3]  
EINSPRUCH NG, 1982, VLSI ELECTRONICS
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Somorjai G. A, 1981, CHEM 2 DIMENSIONS