DEVICE FOR HIGH-RESOLUTION POSITIONING

被引：1

作者：

CARR, R

THOMSON, RE

机构：

[1] UNIV CALIF BERKELEY,DEPT PHYS,BERKELEY,CA 94720

[2] LAWRENCE BERKELEY LAB,DIV MAT SCI,BERKELEY,CA 94720

来源：

ULTRAMICROSCOPY | 1992年 / 42卷

关键词：

D O I：

10.1016/0304-3991(92)90492-3

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

This paper is a description of a high resolution actuator consisting of a smooth round shaft and a mechanism which translates when the shaft is rotated. The motion is monotonic and controllable to less than 900 Angstroms per degree of rotation. The mechanism is rigid, stable, and offers an unlimited range; it is vacuum compatible, and ideally suited to the approach function for a scanning tunneling microscope.

引用

页码：1606 / 1609

页数：4