ANALYSIS OF THIN-FILMS ARISING FROM ELECTRON-BEAM-INDUCED, ION-BEAM-INDUCED AND PHOTON-BEAM-INDUCED DECOMPOSITION OF CR(CO)6 AND AL(CH3)3

被引：23

作者：

BIGELOW, RW

BLACK, JG

DUKE, CB

SALANECK, WR

THOMAS, HR

机构：

来源：

THIN SOLID FILMS | 1982年 / 94卷 / 03期

关键词：

D O I：

10.1016/0040-6090(82)90300-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：233 / 247

页数：15

共 48 条

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