SOURCE CONTAMINATION EFFECTS ON EPITAXY OF GE FILMS ON GE

被引:11
作者
DAVEY, JE
机构
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1965年 / 2卷 / 01期
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D O I
10.1116/1.1492392
中图分类号
O59 [应用物理学];
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页码:12 / &
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