THE EFFICIENCY OF GAS USAGE IN GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON

被引：3

作者：

SMITH, GJ

MILNE, WI

机构：

来源：

SOLAR ENERGY MATERIALS | 1984年 / 9卷 / 04期

关键词：

D O I：

10.1016/0165-1633(84)90019-4

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：459 / 470

页数：12

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