A NEW INLET AREA DESIGN FOR HORIZONTAL MOVPE REACTORS

被引:17
作者
GOODINGS, C [1 ]
MASON, NJ [1 ]
WALKER, PJ [1 ]
JEBB, DP [1 ]
机构
[1] UNIV OXFORD,CLARENDON LAB,PARKS RD,OXFORD,ENGLAND
关键词
D O I
10.1016/0022-0248(89)90270-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:13 / 18
页数:6
相关论文
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