THE USE OF BESSEL-FUNCTIONS TO EXTEND THE RANGE OF OPTICAL DIFFRACTION TECHNIQUES FOR IN-PROCESS SURFACE FINISH MEASUREMENTS OF HIGH-PRECISION TURNED PARTS

被引：8

作者：

RAKELS, JH

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1986年 / 19卷 / 01期

关键词：

D O I：

10.1088/0022-3735/19/1/015

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：76 / 79

页数：4

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[4]

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[5]

JUNGLES J, 1973, P ELECTROOPTICS C BR

[6]

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[8]

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[9]

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[10]

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