EFFECT OF NONUNIFORM PIEZOELECTRIC FILMS ON MONOLITHIC SURFACE ACOUSTIC-WAVE DEVICES

被引：3

作者：

BOWERS, JE

THORNTON, RL

KHURIYAKUB, BT

JUNGERMAN, RL

KINO, GS

机构：

来源：

关键词：

D O I：

10.1063/1.93694

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：805 / 807

页数：3

共 10 条

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BOWERS, JE
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (03) : 231 - 233
[2] BOWERS JE, 1980, APPL PHYS LETT, V10, P806
[3] GRUDKOWSKI TW, 1980, ULTRASONICS S P, P88
[4] HICKERNELL FS, 1980, ULTRASONICS S P, P784
[5] KHURIYAKUB BT, 1980, ULTRASONICS S P, P801
[6] THEORY OF INTERDIGITAL COUPLERS ON NONPIEZOELECTRIC SUBSTRATES
KINO, GS
WAGERS, RS
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) : 1480 - 1488
[7] SHIOSAKI T, 1981, ULTRASONICS S P, P506
[8] SUBOUCHI KT, 1981, ULTRASONICS S P, P375
[9] CHARACTERIZATION OF ZNO PIEZOELECTRIC FILMS PREPARED BY RF PLANAR-MAGNETRON SPUTTERING
YAMAMOTO, T
SHIOSAKI, T
KAWABATA, A
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) : 3113 - 3120
[10] 1970, HDB THIN FILM TECHNO