MATERIAL AND DESIGN CONSIDERATIONS FOR LOW-POWER MICROHEATER MODULES FOR GAS-SENSOR APPLICATIONS

被引：21

作者：

MOLLER, S ^{[1
]}

LIN, J ^{[1
]}

OBERMEIER, E ^{[1
]}

机构：

[1] TECH UNIV BERLIN,D-13355 BERLIN,GERMANY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 25卷 / 1-3期

关键词：

GAS SENSORS; MICROHEATER MODULES; MEMBRANE-TYPE SENSOR ELEMENTS; SILICON MICROMACHINING; SILICON CARBIDE; DIAMOND-LIKE CARBON; FINITE-ELEMENT METHOD;

D O I：

10.1016/0925-4005(95)85077-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A large number of gas-sensitive materials like semiconducting metal oxides operate only at elevated temperatures. A new type of low-power microheater module based on new materials (such as diamond-like carbon or silicon carbide) is investigated. Simulation methods (finite-element method, FEM) are used to compare different types of concepts for low-power microheater modules. The thermal behaviour of membranes with different material combinations and the mechanical stress induced into a thin membrane at elevated temperatures are analysed by simulation. The advantage of using new materials like diamond, diamond-like carbon or silicon carbide films in these fields will be demonstrated and a proposal for realization is given. The benefit of extensive simulation studies in the approach is to minimize the costs for development, especially in sensitive fields of research and development.

引用

页码：343 / 346

页数：4