REACTION PROCESS OF TITANIUM TETRACHLORIDE WITH AMMONIA IN THE VAPOR-PHASE AND PROPERTIES OF THE TITANIUM NITRIDE FORMED

被引：40

作者：

SAEKI, Y

MATSUZAKI, R

YAJIMA, A

AKIYAMA, M

机构：

来源：

关键词：

D O I：

10.1246/bcsj.55.3193

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：3193 / 3196

页数：4

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