STRUCTURAL STUDIES OF NATURAL SUPERLATTICES IN GROUP III-V ALLOY EPITAXIAL LAYERS

被引：58

作者：

NORMAN, AG ^{[1
]}

SEONG, TY ^{[1
]}

FERGUSON, IT ^{[1
]}

BOOKER, GR ^{[1
]}

JOYCE, BA ^{[1
]}

机构：

[1] UNIV OXFORD,DEPT MAT,OXFORD OX1 3PH,ENGLAND

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1993年 / 8卷 / 01期

关键词：

D O I：

10.1088/0268-1242/8/1S/003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Structural studies have been performed using transmission electron microscopy and diffraction on III-V ternary and quaternary alloy epitaxial layers. The results revealed that 'natural superlattice' structures had spontaneously formed in some of the layers by phase separation and/or atomic ordering which occurred at the surface during, growth. The structure of these natural superlattices and the growth conditions for their occurrence are described and their effect on the electrical and optical properties of the layers, e.g. bandgap narrowing, and possible mechanisms of formation are briefly discussed.

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页码：S9 / S15

页数：7

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