AN ELECTROSTATIC SERVO-TYPE 3-AXIS SILICON ACCELEROMETER

被引：11

作者：

JONO, K

MINAMI, K

ESASHI, M

机构：

[1] Fac. of Eng., Tohoku Univ., Aramaki, Aoba-ku

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1995年 / 6卷 / 01期

关键词：

D O I：

10.1088/0957-0233/6/1/003

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A three-axis capacitive accelerometer using an electrostatic servo system was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchronous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.

引用

页码：11 / 15

页数：5

共 13 条

[1]

ESASHI M, 1994, MECHANICAL SENSORS, pCH9

[2] DIODE-QUAD BRIDGE CIRCUIT FOR USE WITH CAPACITANCE TRANSDUCERS [J].

HARRISON, DR ;

DIMEFF, J .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (10) :1468-1472

[3]

KUNIMI T, 1993, FEB SOC AUT ENG C DE, P69

[4]

MATSUMOTO Y, 1992, 11 SENS S, P47

[5]

Minami K., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P53, DOI 10.1109/MEMSYS.1993.296951

[6]

OKADA K, 1992, 11 SENS S, P245

[7] BATCH-FABRICATED SILICON ACCELEROMETER [J].

ROYLANCE, LM ;

ANGELL, JB .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1911-1917

[8]

RUDOLF F, 1987, TRANSDUCERS 87, P395

[9]

SCHLAAK HF, 1990, MICRO SYSTEM TECHNOL, P617

[10] CAPACITIVE SILICON ACCELEROMETER WITH HIGHLY SYMMETRICAL DESIGN [J].

SEIDEL, H ;

RIEDEL, H ;

KOLBECK, R ;

MUCK, G ;

KUPKE, W ;

KONIGER, M .

SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :312-315

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