PARTICLE PLASMA INTERACTIONS DURING LOW-PRESSURE PLASMA DEPOSITION

被引:16
作者
APELIAN, D
WEI, D
PALIWAL, M
机构
[1] Drexel Univ, Dep of Materials, Engineering, Philadelphia, PA, USA, Drexel Univ, Dep of Materials Engineering, Philadelphia, PA, USA
关键词
D O I
10.1016/0040-6090(84)90269-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
25
引用
收藏
页码:395 / 407
页数:13
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