THE ETCHING MECHANISMS OF SIO2 IN HYDROFLUORIC-ACID

被引：131

作者：

VERHAVERBEKE, S ^{[1
]}

TEERLINCK, I ^{[1
]}

VINCKIER, C ^{[1
]}

STEVENS, G ^{[1
]}

CARTUYVELS, R ^{[1
]}

HEYNS, MM ^{[1
]}

机构：

[1] KATHOLIEKE UNIV LEUVEN,DEPT CHEM,B-3001 LOUVAIN,BELGIUM

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1994年 / 141卷 / 10期

关键词：

D O I：

10.1149/1.2059243

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The different equilibria in HF and HF/HCl solutions are examined and the etching reaction of SiO2 is investigated as a function of the different species present in the HF solution. A new model for the etching mechanism of SiO2 is developed based on the existence of the dimer of HF, (HF)2.

引用

页码：2852 / 2857

页数：6

共 17 条

[1] KINETICS OF THE DEPOLYMERISATION OF TRIOXAN IN AQUEOUS ACIDS, AND THE ACIDIC PROPERTIES OF AQUEOUS HYDROGEN FLUORIDE [J].

BELL, RP ;

BASCOMBE, KN ;

MCCOUBREY, JC .

JOURNAL OF THE CHEMICAL SOCIETY, 1956, (JUN) :1286-1291

[2]

DIKE TR, 1972, J CHEM PHYS, V56, P2442

[3] PROTON-FLUORIDE ASSOCIATION IN SODIUM PERCHLORATE MEDIA [J].

FARRER, HN ;

ROSSOTTI, FJC .

JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1964, 26 (11) :1959-1965

[4] CRYSTAL STRUCTURE OF KH2F3 AND GEOMETRY OF H2F-/3 ION [J].

FORRESTER, JD ;

TEMPLETON, DH ;

ZALKIN, A ;

SENKO, ME .

ACTA CRYSTALLOGRAPHICA, 1963, 16 (01) :58-&

[5]

GEMICK I, 1977, INORG CHEM, V16, P2033

[6] THE NATURE OF HYDROFLUORIC-ACID - A SPECTROSCOPIC STUDY OF THE PROTON-TRANSFER COMPLEX H3O+.F- [J].

GIGUERE, PA ;

TURRELL, S .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1980, 102 (17) :5473-5477

[7] ELECTRON-DIFFRACTION STRUCTURAL STUDY OF POLYMERIC GASEOUS HYDROGEN FLUORIDE [J].

JANZEN, J ;

BARTELL, LS .

JOURNAL OF CHEMICAL PHYSICS, 1969, 50 (08) :3611-&

[8] STUDY OF DISSOLUTION OF SIO2 IN ACIDIC FLUORIDE SOLUTIONS [J].

JUDGE, JS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (11) :1772-&

[9] THEORY OF HYDROGEN BOND - AB-INITIO CALCULATIONS ON HYDROGEN FLUORIDE DIMER AND MIXED WATER-HYDROGEN FLUORIDE DIMER [J].

KOLLMAN, PA ;

ALLEN, LC .

JOURNAL OF CHEMICAL PHYSICS, 1970, 52 (10) :5085-&

[10]

MAI CC, 1966, SCP SOLID STATE TECH, V1, P19

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