THICK-FILM HUMIDITY SENSORS BASED ON (BA, SR)TIO3 POROUS CERAMIC DOPED WITH MGO AND CAO

被引:24
作者
SLUNECKO, J
HOLC, J
HROVAT, M
CEH, M
机构
[1] Jožef Stefan Institute, University of Ljubljana, 61000 Ljubljana
关键词
D O I
10.1016/0925-4005(92)80339-Y
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Undoped and CaO or MgO doped Ba0.5Sr0.5TiO3 materials for humidity sensors were investigated. Sensing elements were prepared in bulk in thick film form. The response of bulk samples, when measured at 400 Hz, was four orders of magnitude for doped and three orders of magnitude for undoped material. The dependence of conductance versus relative humidity for thick film sensors is around one order of magnitude less because of decrease in sensitivity under 40% relative humidity. This is attributed to the deficiency of pores with diameter under 30 nm which is presumably the result of the interaction between the sensing material and the glass phase in Pt electrodes.
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页码:439 / 442
页数:4
相关论文
共 12 条
[1]   HUMIDITY-SENSITIVITY CHARACTERISTICS OF CATIO3 POROUS CERAMICS [J].
CHANG, DA ;
TSENG, TY .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1990, 9 (08) :943-944
[2]   HUMIDITY SENSITIVITY OF NB2O5-DOPED TIO2 CERAMICS [J].
KATAYAMA, K ;
HASEGAWA, K ;
TAKAHASHI, Y ;
AKIBA, T ;
YANAGIDA, H .
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 24 (01) :55-60
[3]  
KATAYAMA K, 1983, P INT M CHEM SENS, P433
[4]   CERAMIC HUMIDITY SENSORS [J].
NITTA, T ;
HAYAKAWA, S .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1980, 3 (02) :237-243
[5]   THEORETICAL-STUDIES ON THE IMPEDANCE HUMIDITY CHARACTERISTICS OF CERAMIC HUMIDITY SENSORS [J].
SHIMIZU, Y ;
ARAI, H ;
SEIYAMA, T .
SENSORS AND ACTUATORS, 1985, 7 (01) :11-22
[6]  
SLUNECKO J, 1991, 8TH EUROPEAN HYBRID MICROELECTRONICS CONFERENCE, PROCEEDINGS, P236
[7]  
SLUNECKO J, IN PRESS J MATER SCI
[8]   HUMIDITY SENSORS - PRINCIPLES AND APPLICATIONS [J].
YAMAZOE, N ;
SHIMIZU, Y .
SENSORS AND ACTUATORS, 1986, 10 (3-4) :379-398
[9]   ANALYSIS OF THE DC AND AC PROPERTIES OF K2O-DOPED POROUS BA0.5SR0.5TIO3 CERAMIC HUMIDITY SENSOR [J].
YEH, YC ;
TSENG, TY .
JOURNAL OF MATERIALS SCIENCE, 1989, 24 (08) :2739-2745
[10]   HUMIDITY-SENSITIVE ELECTRICAL-PROPERTIES OF BA0.5SR0.5TIO3 POROUS CERAMICS [J].
YEH, YC ;
TSENG, TY .
JOURNAL OF MATERIALS SCIENCE LETTERS, 1988, 7 (07) :766-768