A STUDY OF SILICON TRANSISTOR-TIP BY ELECTRON-ACOUSTIC MICROSCOPY

被引:19
作者
TAKENOSHITA, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 09期
关键词
D O I
10.1143/JJAP.23.L680
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L680 / L682
页数:3
相关论文
共 14 条
[1]  
BALK LJ, 1983, C SER, V67, P387
[2]   THERMAL-WAVE MICROSCOPY WITH ELECTRON-BEAMS [J].
BRANDIS, E ;
ROSENCWAIG, A .
APPLIED PHYSICS LETTERS, 1980, 37 (01) :98-100
[3]   ULTRASONIC-IMAGING IN SCANNING ELECTRON-MICROSCOPY [J].
CARGILL, GS .
NATURE, 1980, 286 (5774) :691-693
[4]  
CARGILL GS, 1981, PHYSICS TODAY OCT, P27
[5]  
CARGILL GS, 1980, SCANNED IMAGE MICROS, P319
[6]  
Ikoma T., 1982, OYO BUTURI, V51, P205
[7]   APPLICATION OF ELECTRON BEAM-ACOUSTIC MICROSCOPE TO SEMICONDUCTORS [J].
MORIZUKA, K ;
ADACHI, Y ;
IKOMA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1982, 21 (01) :449-450
[8]   THERMAL WAVE MICROSCOPY WITH PHOTO-ACOUSTICS [J].
ROSENCWAIG, A .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (04) :2210-2211
[9]   THERMAL-WAVE IMAGING [J].
ROSENCWAIG, A .
SCIENCE, 1982, 218 (4569) :223-228
[10]   DEPTH PROFILING OF INTEGRATED-CIRCUITS WITH THERMAL WAVE ELECTRON-MICROSCOPY [J].
ROSENCWAIG, A .
ELECTRONICS LETTERS, 1980, 16 (24) :928-930