TUNGSTEN FILMS WITH THE A15 STRUCTURE

被引：39

作者：

ARITA, M

NISHIDA, I

机构：

[1] Department of Physics, College of General Education, Nagoya University, Chikusa-ku, Nagoya, 464, Furo-cho

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 04期

关键词：

TUNGSTEN; THIN FILMS; A15; STRUCTURE; VACUUM EVAPORATION; OXYGEN; NITROGEN;

D O I：

10.1143/JJAP.32.1759

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Influence of the atmosphere on the crystal structure of thin tungsten films produced by the evaporation method in vacuum was studied. While the crystal structure of the films produced in a high vacuum (e.g., 10(-6) Pa) was bcc, the films took on an A15 structure in oxygen and nitrogen atmospheres (e.g., 10(-4) Pa). This phenomenon did not occur with the introduction of inert gases such as helium and argon.

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页码：1759 / 1764

页数：6

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