UTILIZATION OF A COMMERCIALLY SUPPLIED SYNCHROTRON RADIATION SOURCE

被引：6

作者：

CRAFT, BC

SAILE, V

SCOTT, JD

MORIKAWA, E

机构：

[1] J. Bennett Johnston Sr. Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 56-7卷

关键词：

D O I：

10.1016/0168-583X(91)96052-M

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Louisiana State University (LSU) is developing the Center for Advanced Microstructures and Devices [1] (CAMD) in Baton Rouge, Louisiana. The centerpiece of CAMD will be a 1.2 GeV electron storage ring [2] purchased from Maxwell Laboratories, Inc. The high-tech building for CAMD has been designed by TECH-IV [3] of Baton Rouge with engineering support from Lester B. Knight and Associates [4] of Chicago. The storage ring has been optimized for X-ray lithography. The procedures developed at CAMD for printing integrated circuits may well be of significant importance to US competitiveness in semiconductor and related industries. However, the spectral range of the ring also supports scientific and engineering activities in several other areas.

引用

页码：379 / 382

页数：4

共 5 条

[1]

CRAT BC, 1989, NUCL INSTRUM METH B, V40, P379

[2] GRAZING INCIDENCE VACUUM ULTRAVIOLET MONOCHROMATOR WITH FIXED EXIT SLIT [J].

DIETRICH, H ;

KUNZ, C .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1972, 43 (03) :434-&

[3] THE HIGH-ENERGY PLANE GRATING MONOCHROMATORS AT BESSY [J].

PETERSEN, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :260-263

[4] THE LSU ELECTRON STORAGE RING [J].

SAH, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 56-7 :388-391

[5]

TECH 4 JOINT VENTURE

← 1 →