共 23 条
[1]
MOLECULAR-BEAM STUDY OF GAS-SURFACE CHEMISTRY IN THE ION-ASSISTED ETCHING OF SILICON WITH ATOMIC AND MOLECULAR-HYDROGEN AND CHLORINE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (03)
:1969-1976
[2]
DEVYATYKH GG, 1968, J INORG CHEM, V13, P1494
[4]
DETECTION OF RADICALS AND EXCITED MOLECULES IN DYNAMIC-SYSTEMS
[J].
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES,
1975, 16 (1-2)
:109-124