ELECTRON-IMPACT FRAGMENTATION OF GASES BY MOLECULAR-BEAM MASS-SPECTROMETRY - APPLICATION TO ASCL3 AND A GACL3/GA2CL6 MIXTURE

被引：8

作者：

HOULE, FA

机构：

[1] IBM Research Division, Almaden Research Center, San Jose, CA 95120

来源：

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1993年 / 123卷 / 03期

关键词：

ARSENIC CHLORIDE; GALLIUM CHLORIDE; FRAGMENTATION; MOLECULAR BEAM MASS SPECTROMETRY; PHASE SPECTROMETRY;

D O I：

10.1016/0168-1176(93)87103-Y

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

Molecular beam mass spectrometry is a powerful method for anlayzing and characterizing gas mixtures. Realization of the full potential of the technique requires that accurate simulations of the data be available for comparison to experiment. In this paper, details of how simulations can be optimized for a specific instrument are presented. The utility of the combination of theory and experiment is illustrated by determination of the cracking patterns of AsCl3, and GaCl3 in equilibrium with Ga2Cl6. The results are in poor agreement with previous determinations and origins of the discrepancies are discussed.

引用

页码：243 / 252

页数：10

共 23 条

[1] MOLECULAR-BEAM STUDY OF GAS-SURFACE CHEMISTRY IN THE ION-ASSISTED ETCHING OF SILICON WITH ATOMIC AND MOLECULAR-HYDROGEN AND CHLORINE [J].