INELASTIC LIGHT-SCATTERING STUDIES OF SILICON CHEMICAL VAPOR-DEPOSITION (CVD) SYSTEMS

被引：58

作者：

SEDGWICK, TO ^{[1
]}

SMITH, JE ^{[1
]}

GHEZ, R ^{[1
]}

COWHER, ME ^{[1
]}

机构：

[1] IBM CORP,TJ WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598

来源：

JOURNAL OF CRYSTAL GROWTH | 1975年 / 31卷 / DEC期

关键词：

D O I：

10.1016/0022-0248(75)90140-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：264 / 273

页数：10

相关论文

共 35 条

[1] ANDREWS RW, 1969, SOLID STATE TECHNOL, P61
[2] MASS SPECTROMETRIC STUDIES OF VAPOR-PHASE CRYSTAL GROWTH .2. GAN
BAN, VS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (06) : 761 - &
[3] MASS SPECTROMETRIC STUDIES OF VAPOR PHASE CRYSTAL GROWTH .1. GAASXP1-X SYSTEM (0 LESS THAN OR EQUAL TO X LESS THAN OR EQUAL TO 1)
BAN, VS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (09) : 1473 - &
[4] BAN VS, COMMUNICATION
[5] BAN VS, 1974, MAY EL SOC M SAN FRA
[6] BATCHELOR GK, 1967, INTRO FLUID DYNAMICS, pCH3
[7] GAS-PHASE RAMAN SPECTROSCOPY OF TRIGONAL BIPYRAMIDAL PENTACHLORIDES AND PENTABROMIDES
BEATTIE, IR
OZIN, GA
[J]. JOURNAL OF THE CHEMICAL SOCIETY A -INORGANIC PHYSICAL THEORETICAL, 1969, (11): : 1691 - &
[8] GAS-PHASE RAMAN SPECTRA OF P4, P2, AS4, AND AS2 - RESONANCE FLUORESCENCE SPECTRUM OF (SE-80)2 RESONANCE FLUORESCENCE-RAMAN EFFECTS IN GAS-PHASE SPECTRA OF SULPHUR AND I2 - EFFECT OF PRESSURE ON DEPOLARIZATION RATIOS FOR I2
BEATTIE, IR
OZIN, GA
PERRY, RO
[J]. JOURNAL OF THE CHEMICAL SOCIETY A -INORGANIC PHYSICAL THEORETICAL, 1970, (12): : 2071 - &
[9] BEATTIE JR, 1969, J CHEM SOC A, P2655
[10] VAPOR-PHASE RAMAN-SPECTRA, RAMAN BAND CONTOUR ANALYSES, CORIOLIS CONSTANTS, AND FORCE CONSTANTS OF SPHERICAL-TOP MOLECULES MX4 (M = GROUP IV ELEMENT, X = F, CL, BR, OR I)
CLARK, RJH
RIPPON, DM
[J]. JOURNAL OF MOLECULAR SPECTROSCOPY, 1972, 44 (03) : 479 - 503

← 1 2 3 4 →