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ON THE THERMAL-OXIDATION OF TITANIUM-IMPLANTED COPPER-FILMS

被引：8
作者：
SVENDSEN, LG
ESKILDSEN, SS
BORGESEN, P
机构：
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
[2] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
来源：
THIN SOLID FILMS | 1983年 / 110卷 / 03期
关键词：
D O I：
10.1016/0040-6090(83)90241-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：237 / 240
页数：4
相关论文
共 9 条
  • [1] DEPTH PROFILING BY ION-BEAM SPECTROMETRY
    BORGESEN, P
    BEHRISCH, R
    SCHERZER, BMU
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 27 (04): : 183 - 195
  • [2] Borgesen P., UNPUB
  • [3] Chu WK., 1978, BACKSCATTERING SPECT
  • [4] THE ALTERATION OF OXIDATION AND RELATED PROPERTIES OF METALS BY ION-IMPLANTATION
    DEARNALEY, G
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 899 - 914
  • [5] INFLUENCE OF ION-IMPLANTATION ON THERMAL-OXIDATION OF COPPER
    MORRIS, JR
    COLLINS, RA
    DEARNALEY, G
    [J]. JOURNAL OF PHYSICS F-METAL PHYSICS, 1978, 8 (06): : 1333 - 1342
  • [6] RICKARDS J, 1974, 1974 P INT C APPL IO, P101
  • [7] COMPARISON OF THE CORROSION PROTECTION OF COPPER BY ION-IMPLANTATION OF AL AND CR
    SVENDSEN, LG
    [J]. CORROSION SCIENCE, 1980, 20 (01) : 63 - 68
  • [8] CORROSION INHIBITION BY ION-IMPLANTATION OF AL OR MG IN CU, INVESTIGATED BY RBS
    SVENDSEN, LG
    BORGESEN, P
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 141 - 145
  • [9] SVENDSEN LG, 1978, THESIS U AARHUS
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