ON THE THERMAL-OXIDATION OF TITANIUM-IMPLANTED COPPER-FILMS

被引:8
作者
SVENDSEN, LG
ESKILDSEN, SS
BORGESEN, P
机构
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
[2] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
关键词
D O I
10.1016/0040-6090(83)90241-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:237 / 240
页数:4
相关论文
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