STRONG ELEMENT DEPENDENCE OF C 1S AND SI 2P X-RAY PHOTOELECTRON DIFFRACTION PROFILES FOR IDENTICAL C AND SI LOCAL GEOMETRIES IN BETA-SIC

被引:24
作者
JUILLAGUET, S
KUBLER, L
DIANI, M
BISCHOFF, JL
GEWINNER, G
WETZEL, P
BECOURT, N
机构
[1] UNIV HAUTE ALSACE,FAC SCI,PHYS & SPECT ELECTR LAB,CNRS,URA 1435,F-68093 MULHOUSE,FRANCE
[2] CEN GRENOBLE,CEA,LETI,F-38054 GRENOBLE 9,FRANCE
关键词
COMPUTER SIMULATIONS; LOW INDEX SINGLE CRYSTAL SURFACES; PHOTOELECTRON DIFFRACTION; SILICON CARBIDE; X-RAY PHOTOELECTRON SPECTROSCOPY;
D O I
10.1016/0039-6028(95)00676-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have measured photoelectron diffraction polar profiles for a beta-SiC film grown epitaxially on Si(001). Tha data reveal dominant single domain growth with a good crystallinity but the C 1s and Si 2p profiles exhibit remarkably strong differences in spite of the identical geometries of the sites occupied by these elements in the ZnS-type lattice. Mast obvious are the large angular shifts and changes in intensity between expected and measured forward scattering peaks. Our results obtained at low angular resolution (similar to 5 degrees) in the high kinetic energy range (similar to 1000 eV) provide a striking example of the limitations of the often invoked forward scattering picture. The measured profiles are rather well reproduced by single scattering cluster simulations. The observed elemental dependence can be traced back to the marked change in complex scattering amplitude between C and Si along with the very general fact, by no means restricted to the SiC(001) case, that a large number of scatterers, in particular out-of-chain atoms with a low scattering angle, make a substantial contribution to the photoelectron wave around forward scattering directions. The: related energy and element dependent interference effects are particularly strong along the low density [001] C chains of the open ZnS-type structure and reflect in a drastic peak splitting due to the strong scattering at lateral Si atoms. In contrast, the [001] Si chains in beta-SiC lead to an essentially structureless forward scattering peak due to the lower scattering amplitude of lateral C atoms.
引用
收藏
页码:363 / 371
页数:9
相关论文
共 19 条
[1]  
AGLIZ D, 1995, IN PRESS SURF SCI
[2]   IN-SITU SURFACE TECHNIQUE ANALYSES AND EX-SITU CHARACTERIZATION OF SI1-XGEX EPILAYERS GROWN ON SI(001)-2X1 BY MOLECULAR-BEAM EPITAXY [J].
AUBEL, D ;
DIANI, M ;
STOEHR, M ;
BISCHOFF, JL ;
KUBLER, L ;
BOLMONT, D ;
FRAISSE, B ;
FOURCADE, R ;
MULLER, D .
JOURNAL DE PHYSIQUE III, 1994, 4 (04) :733-740
[3]   CHARACTERIZATION OF THE BUFFER LAYER IN SIC HETEROEPITAXY [J].
BECOURT, N ;
CROS, B ;
PONTHENIER, JL ;
BERJOAN, R ;
PAPON, AM ;
JAUSSAUD, C .
APPLIED SURFACE SCIENCE, 1993, 68 (04) :461-466
[4]  
BISCHOFF JL, 1992, SOLID STATE COMMUN, V83, P883
[5]   STRONGLY Z-DEPENDENT AUGER AND PHOTOELECTRON DIFFRACTION IN MGO(001) [J].
CHAMBERS, SA ;
TRAN, TT .
SURFACE SCIENCE, 1994, 314 (02) :L867-L871
[6]   MEASUREMENT OF COMPLETE AUGER-ELECTRON EMISSION ANGULAR-DISTRIBUTIONS FROM BETA-SIC FILMS ON SI(100) [J].
CHYAN, OMR ;
FRANK, DG ;
HUBBARD, AT ;
LI, JP ;
STECKL, AJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (02) :457-464
[7]   SPHERICAL-WAVE CORRECTIONS IN PHOTOELECTRON DIFFRACTION [J].
DELEON, JM ;
REHR, JJ ;
NATOLI, CR ;
FADLEY, CS ;
OSTERWALDER, J .
PHYSICAL REVIEW B, 1989, 39 (09) :5632-5639
[8]   X-RAY PHOTOELECTRON DIFFRACTION OBSERVATION OF BETA-SIC(001) OBTAINED BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ASSISTED GROWTH ON SI(001) [J].
DIANI, M ;
BISCHOFF, JL ;
KUBLER, L ;
BOLMONT, D .
APPLIED SURFACE SCIENCE, 1993, 68 (04) :575-582
[9]  
EGELHOFF WF, 1994, ULTRA THIN MAGNETIC, V1
[10]   ANGLE-RESOLVED X-RAY PHOTOELECTRON-SPECTROSCOPY [J].
FADLEY, CS .
PROGRESS IN SURFACE SCIENCE, 1984, 16 (03) :275-388