METAL BEAM PRODUCTION USING A HIGH-CURRENT ION-SOURCE

被引：25

作者：

KELLER, R

NIELSEN, BR

TORP, B

机构：

[1] GESELL SCHWERIONENFORSCH,D-6100 DARMSTADT,FED REP GER

[2] DANFYS AS,DK-4040 JYLLINGE,DENMARK

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90138-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：74 / 77

页数：4

共 6 条

[1]

ANDERSEN HH, 1981, TOP APPL PHYS, V47, P145, DOI [10.1007/3540105212_9, DOI 10.1007/3540105212_9]

[2] RECENT RESULTS WITH A HIGH-CURRENT, HEAVY-ION SOURCE SYSTEM [J].

KELLER, R ;

SPADTKE, P ;

EMIG, H .

VACUUM, 1986, 36 (11-12) :833-835

[3]

Keller R., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P25

[4]

KELLER R, 1987, 1987 P PART ACC C WA

[5]

KELLER R, 1986, AM I PHYS C P, V139, P1

[6]

SAKUDO N, 1984, VACUUM, V34, P245, DOI 10.1016/0042-207X(84)90136-2

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