EFFECT OF ELEVATED TEMPERATURES ON SPUTTERING YIELDS

被引：47

作者：

CARLSTON, CE

MAGNUSON, GD

COMEAUX, A

MAHADEVAN, P

机构：

来源：

PHYSICAL REVIEW | 1965年 / 138卷 / 3A期

关键词：

D O I：

10.1103/PhysRev.138.A759

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：A759 / +

页数：1

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