POLYCRYSTALLINE SILICON-ON-METAL STRAIN-GAUGE TRANSDUCERS

被引：29

作者：

ERSKINE, JC

机构：

来源：

关键词：

D O I：

10.1109/T-ED.1983.21212

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：796 / 801

页数：6

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