FABRICATION OF BI2SR2CACU2OX HIGH-TC SUPERCONDUCTING FILM WITH H2O ASSISTED METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：5

作者：

NISHIKAWA, T

SATOH, M

ASADA, K

SUGANO, T

机构：

[1] Department of Electronic Engineering, The University of Tokyo, Tokyo, 113, 7-3-1 Hongo, Bunkyo-ku

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1992年 / 31卷 / 11B期

关键词：

SUPERCONDUCTOR; BI2SR2CACU2OX; MOCVD; H2O ASSISTED; CRYSTALLIZATION;

D O I：

10.1143/JJAP.31.L1592

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

With the objective of the deposition of Bi2Sr2CaCu2Ox (BSCCO(2212)) films at low temperature, the metalorganic chemical vapor deposition (MOCVD) has been carried out and c-axis oriented BSCCO(2212) films on MgO(001) substrates were obtained at 550-degrees-C and 600-degrees-C. When water vapor was added into the reactor, the crystallization of deposited films changed in relation to the partial pressure of water vapor. The more H2O was supplied, the less BSCCO(2212) crystal tended to be formed at 600-degrees-C, and the opposite tendency was found at 550-degrees-C.

引用

页码：L1592 / L1594

页数：3

共 5 条

[1] PHASE-CONTROL OF SUPERCONDUCTING BI SR CA CU O THIN-FILMS PREPARED BY LASER ABLATION METHOD [J].

EGAMI, Y ;

TABATA, H ;

KINUGASA, M ;

KAWAI, T ;

KAWAI, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (3B) :L478-L481

[2]

IHARA K, 1989, OYO BUTURI, V58, P751

[3]

KOBAYASHI K, 1989, JPN J APPL PHYS, V28, pL649

[4] ASSIGNMENT OF THE POWDER X-RAY-DIFFRACTION PATTERN OF SUPERCONDUCTOR BI2(SR,CA)3-XCU2OY [J].

ONODA, M ;

YAMAMOTO, A ;

TAKAYAMAMUROMACHI, E ;

TAKAYAMAMUROMACHI, E .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (05) :L833-L836

[5] EFFECT OF TEMPERATURE AND OXYGEN-PRESSURE ON PREPARATION OF BI2SR2CACU2OX THIN-FILMS BY METALORGANIC DEPOSITION [J].

YAEGASHI, S ;

MURAKAMI, H ;

NISHINO, J ;

SHIOHARA, Y ;

TANAKA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (3B) :L471-L474

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