MECHANISM OF POLYSILAZANE THIN-FILM FORMATION DURING GLOW-DISCHARGE POLYMERIZATION OF HEXAMETHYLCYCLOTRISILAZANE

被引:37
作者
WROBEL, AM [1 ]
KRYSZEWSKI, M [1 ]
GAZICKI, M [1 ]
机构
[1] POLISH ACAD SCI,CTR MOLEC & MACROMOLEC STUDIES,LODZ 40,POLAND
关键词
D O I
10.1016/0032-3861(76)90206-8
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
引用
收藏
页码:673 / 677
页数:5
相关论文
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