CHEMICAL AMPLIFICATION IN HIGH-RESOLUTION IMAGING-SYSTEMS

被引：233

作者：

MACDONALD, SA ^{[1
]}

WILLSON, CG ^{[1
]}

FRECHET, JMJ ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT CHEM,BAKER LAB,ITHACA,NY 14854

来源：

ACCOUNTS OF CHEMICAL RESEARCH | 1994年 / 27卷 / 06期

关键词：

D O I：

10.1021/ar00042a001

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

[No abstract available]

引用

收藏

页码：151 / 158

页数：8

相关论文

共 59 条

[1] BAKEMAN P, 1990, S VLSI TECH, P11
[2] SYNTHESIS, CHARACTERIZATION, AND DEBLOCKING OF POLY(4-TERT-BUTOXYSTYRENE) AND POLY(4-TERT-BUTOXY-ALPHA-METHYLSTYRENE)
CONLON, DA
CRIVELLO, JV
LEE, JL
OBRIEN, MJ
[J]. MACROMOLECULES, 1989, 22 (02) : 509 - 516
[3] CRIVELLO JV, 1984, ADV POLYM SCI, V62, P1
[4] TRIPHENYLSULFONIUM SALT PHOTOCHEMISTRY - NEW EVIDENCE FOR TRIPLET EXCITED-STATE REACTIONS
DEKTAR, JL
HACKER, NP
[J]. JOURNAL OF ORGANIC CHEMISTRY, 1988, 53 (08) : 1833 - 1835
[5] Flamm DL., 1989, PLASMA ETCHING, P91
[6] Frechet J. M. J., 1982, P MICROCIRCUIT ENG, P260
[7] THE PHOTOGENERATION OF ACID AND BASE WITHIN POLYMER-COATINGS - APPROACHES TO POLYMER CURING AND IMAGING
FRECHET, JMJ
[J]. PURE AND APPLIED CHEMISTRY, 1992, 64 (09) : 1239 - 1248
[8] FRECHET JMJ, 1989, ACS SYM SER, V412, P100
[9] THERMALLY DEPOLYMERIZABLE POLYCARBONATES .5. ACID-CATALYZED THERMOLYSIS OF ALLYLIC AND BENZYLIC POLYCARBONATES - A NEW ROUTE TO RESIST IMAGING
FRECHET, JMJ
BOUCHARD, F
EICHLER, E
HOULIHAN, FM
IIZAWA, T
KRYCZKA, B
WILLSON, CG
[J]. POLYMER JOURNAL, 1987, 19 (01) : 31 - 49
[10] DESIGN, SYNTHESIS, AND STUDY OF NOVEL, THERMALLY DEPOLYMERIZABLE POLYCARBONATES
FRECHET, JMJ
HOULIHAN, FM
BOUCHARD, F
KRYCZKA, B
WILSON, CG
[J]. JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1985, (21) : 1514 - 1516

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