HELIUM ION-BOMBARDMENT OF THIN ALUMINUM FILMS

被引：12

作者：

DONNELLY, SE

BODART, F

BARFOOT, KM

WERZ, R

WEBB, RP

机构：

[1] EURATOM,CENT BUR NUCL MEASUREMENTS,B-2440 GEEL,BELGIUM

[2] UNIV SALFORD,ATOM COLLIS SOLIDS GRP,SALFORD M5 4WT,LANCS,ENGLAND

来源：

THIN SOLID FILMS | 1982年 / 94卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90491-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：289 / 305

页数：17

共 16 条

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[3] THE DEFORMATION OF THIN ALUMINUM FILMS UNDER HELIUM ION-BOMBARDMENT [J].

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DEBRAS, G ;

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LUCAS, AA .

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[5]

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[7]

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[8] ROLE OF IMPLANTED GAS AND LATERAL STRESS IN BLISTER FORMATION MECHANISMS [J].

EVANS, JH .

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[9] ENERGY-LOSS STRAGGLING OF LOW-ENERGY PROTONS IN CARBON [J].

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[10] LIFE-CYCLE OF COPPER CONES [J].

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