THERMOCHEMICAL ACTION OF LASER-RADIATION ON THIN METAL-FILMS

被引:31
作者
METEV, SM [1 ]
SAVTCHENKO, SK [1 ]
STAMENOV, KV [1 ]
VEIKO, VP [1 ]
KOTOV, GA [1 ]
SHANDIBINA, GD [1 ]
机构
[1] LENINGRAD FINE MECH & OPT INST,LENINGRAD,USSR
关键词
D O I
10.1109/JQE.1981.1070644
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:2004 / 2008
页数:5
相关论文
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[4]   PATTERN GENERATION BY LASER-INDUCED OXIDATION OF THIN METAL-FILMS [J].
METEV, SM ;
SAVTCHENKO, SK ;
STAMENOV, KV .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1980, 13 (04) :L75-&
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