A NOVEL 4-POINT PROBE FOR EPITAXIAL AND BULK SEMICONDUCTOR RESISTIVITY MEASUREMENTS

被引：13

作者：

SCHUMANN, PA

HALLENBACK, JF

机构：

来源：

关键词：

D O I：

10.1149/1.2425809

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：538 / 542

页数：5

共 10 条

ALBERT, MP ;

COMBS, JF .

[2]

BROWNSON J, 1962, MAY LOS ANG M SOC

[3]

GROCHOWSKI E, 1961, OCT DETR M SOC

[4] 4-POINT PROBE FOR MEASURING RESISTIVITY OF SMALL SAMPLES [J].

KENNEDY, JK .

[5]

KEYWELL F, 1960, REV SCI I, V31, P883

LOGAN, MA .

BELL SYSTEM TECHNICAL JOURNAL, 1961, 40 (03) :885-+

[7] MEASUREMENT OF SHEET RESISTIVITIES WITH THE 4-POINT PROBE [J].

SMITS, FM .

BELL SYSTEM TECHNICAL JOURNAL, 1958, 37 (03) :711-718

UHLIR, A .

BELL SYSTEM TECHNICAL JOURNAL, 1955, 34 (01) :105-128

[9] RESISTIVITY MEASUREMENTS ON GERMANIUM FOR TRANSISTORS [J].

VALDES, LB .

PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1954, 42 (02) :420-427

[10]

Vaughan D E, 1961, BR J APPL PHYS, V12, P414