MASS-SPECTROGRAPHIC ANALYSIS OF HIGH-TC NB-GE SPUTTERED FILMS

被引:8
作者
SANTHANAM, AT [1 ]
GAVALER, JR [1 ]
机构
[1] WESTINGHOUSE ELECT CO,RES LABS,PITTSBURGH,PA 15235
关键词
D O I
10.1063/1.322090
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:3633 / 3636
页数:4
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