PATTERN TRANSFER

被引：3

作者：

COBURN, JW

机构：

[1] IBM, San Jose, CA, USA, IBM, San Jose, CA, USA

来源：

SUPERLATTICES AND MICROSTRUCTURES | 1986年 / 2卷 / 01期

关键词：

D O I：

10.1016/0749-6036(86)90148-5

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：17 / 25

页数：9

共 36 条

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[7] ION-BEAM-ASSISTED ETCHING OF DIAMOND [J].

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[8] SUBMICROMETER PATTERNING BY PROJECTED EXCIMER-LASER-BEAM INDUCED CHEMISTRY [J].

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[9]

EHRLICH DJ, 1983, J VAC SCI TECHNOL B, V1, P969, DOI 10.1116/1.582718

[10]

GAMO K, 1984, APPL PHYS LETT, V23, P293

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