ELECTRON MICROSCOPIC OBSERVATION ON HEAT OXIDATION OF VACUUM-DEPOSITED ALUMINIUM FILMS

被引：11

作者：

SUITO, E

SHIOJIRI, M

MORIKAWA, H

机构：

来源：

关键词：

D O I：

10.1143/JJAP.5.1197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1197 / &

共 11 条

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