COLLECTOR-ASSISTED OPERATION OF MICROMACHINED FIELD-EMITTER TRIODES

被引:20
作者
BUSTA, HH
POGEMILLER, JE
ZIMMERMAN, BJ
机构
[1] Amoco Technology Company, Amoco Research Center
关键词
D O I
10.1109/16.223716
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The field at the tip of a field emitter triode can be expressed by E = betaV(g) + gammaV(c) with V(g) and V(c) the gate and collector voltages, respectively. For small gate diameters and tips below or in the plane of the gate and/or large tip-to-collector distances, gammaV(c) << betaV(g). The device is operated in the gate-induced field emission mode and the corresponding I-V(c) curves are ''pentode''-like. By increasing the gate diameter and/or recessing the gates from the tips, collector-assisted operation can be achieved at reasonable collector voltages. Results will be presented for two devices with gate diameters of 3.6 and 2.0 mum. By obtaining gamma at different emitter-to-collector distances, I-V(c) and transconductance g(m)-V(g) curves have been calculated and compared with experimental results. It will be shown that as a consequence of collector-assisted operation, the transconductance of a device can be increased significantly.
引用
收藏
页码:1537 / 1542
页数:6
相关论文
共 6 条
[1]  
BENZ F, 1950, EINFUHRUNG FUNKTECHN, pCH2
[2]  
BRODIE I, 1992, ADV ELECTRON EL PHYS, V83, P1
[3]  
Busta H. H., 1992, Journal of Micromechanics and Microengineering, V2, P43, DOI 10.1088/0960-1317/2/2/001
[4]   EMISSION CHARACTERISTICS OF SILICON VACUUM TRIODES WITH 4 DIFFERENT GATE GEOMETRIES [J].
BUSTA, HH ;
POGEMILLER, JE ;
ZIMMERMAN, BJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (08) :1530-1536
[5]   COLLECTOR-INDUCED FIELD-EMISSION TRIODE [J].
BUSTA, HH ;
JENKINS, DW ;
ZIMMERMAN, BJ ;
POGEMILLER, JE .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1992, 39 (11) :2616-2620
[6]   DESIGN OF HIGH-VACUUM TEST STATION FOR RAPID EVALUATION OF VACUUM MICROELECTRONIC DEVICES [J].
BUSTA, HH ;
POGEMILLER, JE ;
ZIMMERMAN, BJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) :2350-2354