VACUUM CHARACTERISTICS OF TITANIUM

被引：16

作者：

MINATO, M

ITOH, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579781

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：540 / 544

页数：5

共 19 条

[1]

BERMAN A, 1985, TOTAL PRESSURE MEASU, P289

[2]

BERMAN A, 1971, IA1236 ISR AT EN COM

[3] ABSOLUTE CALIBRATION OF ION GAUGES BY MEANS OF A BAKEABLE ADJUSTABLE CONDUCTANCE [J].

CHOUMOFF, PS ;

BERNARDET, H ;

MATIVET, J ;

SAUNEUF, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (01) :270-+

[4] CORRELATION OF OUTGASSING OF STAINLESS-STEEL AND ALUMINUM WITH VARIOUS SURFACE TREATMENTS [J].

DYLLA, HF ;

MANOS, DM ;

LAMARCHE, PH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (05) :2623-2636

[5] OUTGASSING AND DESORPTION OF THE STAINLESS-STEEL BEAM TUBES AFTER DIFFERENT DEGASSING TREATMENTS [J].

HSEUH, HC ;

CUI, XH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :2418-2422

[6] ALL-ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR A LARGE-SCALE ELECTRON POSITRON COLLIDER [J].

ISHIMARU, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :1170-1175

[7] ULTIMATE PRESSURE OF THE ORDER OF 10-13 TORR IN AN ALUMINUM-ALLOY VACUUM CHAMBER [J].

ISHIMARU, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :2439-2442

[8] TITANIUM NITRIDE FILM AS A PROTECTIVE COATING FOR A VACUUM DEPOSITION CHAMBER [J].

KOMIYA, S ;

UMEZU, N ;

HAYASHI, C .

THIN SOLID FILMS, 1979, 63 (02) :341-346

[9] MODEL FOR THE OUTGASSING OF WATER FROM METAL-SURFACES [J].

LI, MX ;

DYLLA, HF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :1702-1707

[10]

MINATO M, 1993, SHINKU, V36, P175

← 1 2 →