PROPERTIES OF SHIELDED MICROSTRIP LINE RESONATORS MADE FROM DOUBLE-SIDED Y1BA2CU3OX FILMS

被引:6
作者
MIURA, S [1 ]
YOSHITAKE, T [1 ]
TSUGE, H [1 ]
INUI, T [1 ]
机构
[1] NEC CORP LTD,RESOURCES & ENVIRONM PROTECT RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN
关键词
D O I
10.1063/1.357342
中图分类号
O59 [应用物理学];
学科分类号
摘要
Double-sided Y1Ba2Cu3O(x) films are prepared on MgO(100) substrates for KrF excimer laser deposition and their electrical properties, both direct current and microwave frequencies, are examined. Double-sided Y1Ba2Cu3O(x) films show zero resistivity at temperatures higher than 88 K and rho(300K)/rho(100 K) higher than 2.7. Using a niobium shield, a double-sided Y1Ba2Cu3O(x) films microstrip line resonator at 5.7 GHz shows an unloaded Q value of 2.6 x 10(4) at 77 K and 1.1 x 10(5) at 4.2 K. These are the highest class of unloaded Q known to be reported for planar-type resonators.
引用
收藏
页码:4440 / 4442
页数:3
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