YBA2CU3OX THIN-FILMS WITH YTTRIA-STABILIZED ZIRCONIA BUFFER LAYER ON METAL-SUBSTRATE BY LIQUID SOURCE CHEMICAL-VAPOR-DEPOSITION USING TETRAHYDROFURAN SOLUTION OF BETA-DIKETONATES

被引：15

作者：

MATSUNO, S ^{[1
]}

UMEMURA, T ^{[1
]}

UCHIKAWA, F ^{[1
]}

IKEDA, B ^{[1
]}

机构：

[1] SUPER GM,KITA KU,OSAKA 530,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 5A期

关键词：

YBCO SUPERCONDUCTING THIN FILM; LIQUID SOURCE CVD; THF SOLUTION; YSZ BUFFER LAYER; METAL SUBSTRATE;

D O I：

10.1143/JJAP.34.2293

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Textured YBa2Cu3Ox (YBCO) thin films with c-axis orientation on Ni-based metal substrate with yttria stabilized zirconia (YSZ) and Pt buffer layers were formed by liquid source chemical vapor deposition (LS-CVD) using tetrahydrofuran (THF) solution of beta-diketonates. The YSZ buffer layer with a-axis orientation was formed by the similar LS-CVD on prebuffer layers of amorphous YSZ and Pt deposited by sputtering at room temperature. The CVD-YSZ buffer layer was mechanically polished before the deposition of YBCO. By transmission electron microscopy (TEM) and analytical electron microscopy (AEM), it was ascertained that YBCO and YSZ layers had platelike and column-shaped grains, respectively. An intermetallic compound of the Pt-Ni-Cr system was produced in the vicinity between the YSZ layer and metal substrate. The critical temperature (T-c) of 91 K and the transport critical current densities (J(c)) of 1.4 x 10(5) A/cm(2) at 77 K, zero held, and 2.0 x 10(4) A/cm(2) at 1.5 T were achieved.

引用

收藏

页码：2293 / 2299

页数：7

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