ELECTROSTATICALLY DRIVEN OVERDENSE RF PLASMA SOURCE

被引:26
作者
MOTLEY, RW [1 ]
BERNABEI, S [1 ]
HOOKE, WM [1 ]
JASSBY, DL [1 ]
机构
[1] PRINCETON UNIV,PLASMA PHYS LAB,PRINCETON,NJ 08540
关键词
D O I
10.1063/1.322044
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3286 / 3292
页数:7
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