THE DYNAMIC PROPERTIES OF A MONOLITHIC MECHANISM WITH NOTCH FLEXURE HINGES FOR PRECISION CONTROL OF ORIENTATION AND POSITION

被引：17

作者：

TANAKA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 01期

关键词：

D O I：

10.1143/JJAP.22.193

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：193 / 200

页数：8

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