SINGLE-CRYSTAL SILICON TRANSISTORS IN LASER-CRYSTALLIZED THIN-FILMS ON BULK GLASS

被引：27

作者：

JOHNSON, NM

BIEGELSEN, DK

TUAN, HC

MOYER, MD

FENNELL, LE

机构：

来源：

ELECTRON DEVICE LETTERS | 1982年 / 3卷 / 12期

关键词：

D O I：

10.1109/EDL.1982.25603

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：369 / 372

页数：4

共 22 条

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[3]

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[4] LASER-INDUCED CRYSTALLIZATION OF SILICON ISLANDS ON AMORPHOUS SUBSTRATES - MULTILAYER STRUCTURES [J].

BIEGELSEN, DK ;

JOHNSON, NM ;

BARTELINK, DJ ;

MOYER, MD .

APPLIED PHYSICS LETTERS, 1981, 38 (03) :150-152

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CLEEK, GW .

APPLIED OPTICS, 1966, 5 (05) :771-&

[6]

Hawkins W. G., 1982, Laser and Electron Beam Interactions with Solids. Proceedings of the Materials Research Society Annual Meeting, P529

[7]

HAWKINS WB, UNPUB

[8] GROWTH OF SINGLE-CRYSTAL SILICON ISLANDS ON BULK FUSED-SILICA BY CO-2 LASER ANNEALING [J].

HAWKINS, WG ;

BLACK, JG ;

GRIFFITHS, CH .

APPLIED PHYSICS LETTERS, 1982, 40 (04) :319-321

[9]

Johnson N. M., 1981, Laser and Electron-Beam Solid Interactions and Materials Processing. Proceedings of the Materials Research Society Symposium, P463

[10]

Johnson N. M., 1981, Insulating Films on Semiconductors. Proceedings of the Second International Conference, INFOS 81, P234

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