MECHANISM AND KINETICS OF TETRACHLOROSILANE REACTIONS IN AN ARGON-HYDROGEN MICROWAVE PLASMA

被引:31
作者
MAYO, N
CARMI, U
ROSENTHAL, I
AVNI, R
MANORY, R
GRILL, A
机构
[1] NUCL RES CTR NEGEV,POB 9001,IL-84190 BEERSHEBA,ISRAEL
[2] BEN GURION UNIV NEGEV,DEPT MAT ENGN,IL-84107 BEER SHEVA,ISRAEL
关键词
D O I
10.1063/1.333011
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:4404 / 4412
页数:9
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