EXPLOSIVE LIQUID-PHASE CRYSTALLIZATION OF THIN SILICON FILMS DURING PULSE HEATING

被引:19
作者
ANDRA, G
GEILER, HD
GOTZ, G
HEINIG, KH
WOITTENNEK, H
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1982年 / 74卷 / 02期
关键词
D O I
10.1002/pssa.2210740217
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:511 / 515
页数:5
相关论文
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