DEEP RADIATION-DAMAGE IN METALS AFTER ION-IMPLANTATION

被引：12

作者：

FRIEDLAND, E

ALBERTS, HW

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90665-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：710 / 713

页数：4

共 11 条

[1]

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[2]

Friedland E., 1986, South African Journal of Physics, V9, P135

[3]

GETTINGS M, 1974, APPLICATIONS ION BEA, P241

[4] THERMAL-ENERGY BALANCES IN ION-IMPLANTED COPPER BARS [J].

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MIOTELLO, A ;

TOSELLO, C .

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[5] OBSERVATIONS ON HELICAL DISLOCATIONS IN CRYSTALS OF SILVER CHLORIDE [J].

JONES, DA ;

MITCHELL, JW .

PHILOSOPHICAL MAGAZINE, 1958, 3 (25) :1-7

[6]

LINKER G, 1973, ION IMPLANTATION SEM, P465

[7] COMPUTER-SIMULATION OF ATOMIC-DISPLACEMENT CASCADES IN SOLIDS IN BINARY-COLLISION APPROXIMATION [J].

ROBINSON, MT ;

TORRENS, IM .

PHYSICAL REVIEW B, 1974, 9 (12) :5008-5024

[8] RADIATION-DAMAGE IN COPPER SINGLE-CRYSTALS [J].

SOOD, DK ;

DEARNALEY, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :463-467

[9]

VANBUEREN HG, 1961, IMPERFECTIONS CRYSTA, P62

[10] LATTICE DAMAGE IN SINGLE-CRYSTALS OF CU AFTER SELF-IMPLANTATION STUDIED BY CHANNELING [J].

VOS, M ;

BOERMA, DO .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :337-340

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