LARGE-AREA MICROWAVE PLASMA-ETCHING OF POLYIMIDE

被引：32

作者：

LAMONTAGNE, B ^{[1
]}

WROBEL, AM ^{[1
]}

JALBERT, G ^{[1
]}

WERTHEIMER, MR ^{[1
]}

机构：

[1] ECOLE POLYTECH,DEPT ENGN PHYS,MONTREAL H3C 3A7,QUEBEC,CANADA

来源：

关键词：

D O I：

10.1088/0022-3727/20/7/005

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：844 / 850

页数：7

共 24 条

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