PROPERTIES OF HYDROGENATED CARBON-FILMS PRODUCED BY REACTIVE MAGNETRON SPUTTERING

被引:32
作者
MCKENZIE, DR
BRIGGS, LM
机构
来源
SOLAR ENERGY MATERIALS | 1981年 / 6卷 / 01期
关键词
D O I
10.1016/0165-1633(81)90051-4
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:97 / 106
页数:10
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